Amplified piezo actuator with motorized adjustment screw
AssigneeThorlabs, Inc.
InventorsSaeed Fathi, Mark Robson, Keith Dhese
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AssigneeThorlabs, Inc.
InventorsSaeed Fathi, Mark Robson, Keith Dhese
Estimating the term…
A piezoelectric actuator with integrated features to provide linear displacement of a threaded rod is presented. One mechanism provides mechanically amplified piezo motion for high speed/short travel position scanning whereas the other provides a low speed/long travel piezo motorized position adjustment. Mechanical amplifier incorporates one or more piezo stacks in longitudinal axis with preload to translate an amplified motion in the order of a few times in the transverse axis, perpendicular to the piezo stack motion. The piezo amplified output travel is transmitted to the internally threaded features of the other mechanism where a screw with a ball at the end to push a desired surface for high speed scanning mode translation. The internally threaded feature of the other mechanism is also operated by a secondary piezo stack which produces slip-stick motion steps to rotate the screw in one direction or the other to produce a slow speed/long travel mode.
An actuator, comprising:
Dependencies are inferred from the claim text.