Thermoelectric generator module and method for manufacturing the same

A method of manufacturing a thermoelectric generator module, the method comprising:

• a first electrode pattern formation step of forming patterns 200 for first electrodes by performing a photolithography process on a silicon wafer;
• a substrate formation step of forming a PDMS substrate layer on the silicon wafer;
• a substrate via formation step of removing the patterns formed on the silicon wafer and forming vias at positions where the patterns are removed;
• a first electrode deposition pattern formation step of forming a pattern for depositing conductive layers for the first electrodes by performing a photolithography process on only portions where the vias are formed;
• a first electrode deposition step of depositing conductive layers on the pattern to form first electrodes;
• a substrate layer separation step of separating the PDMS substrate layer on which the first electrodes are deposited from the silicon wafer;
• a nanowire transfer and connection step of transferring first nanowires and second nanowires onto the first electrodes formed on the separated PDMS substrate layer to connect the first nanowires and second nanowires to the first electrodes;
• a second electrode deposition pattern formation step of forming a pattern for depositing conductive layers for the second electrodes by performing a photolithography process on the other ends of the nanowires;
• a second electrode deposition step of depositing conductive layers on the pattern to form second electrodes;
• and
• a protective layer formation step of forming a heat shielding protective layer between the first electrode and the second electrode.