Integrated circuit devices and methods of manufacturing the same
AssigneeSamsung Electronics Co., Ltd.
InventorsYong-hee Park, Young-seok Song, Ji-soo Chang, Young-chul Hwang
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AssigneeSamsung Electronics Co., Ltd.
InventorsYong-hee Park, Young-seok Song, Ji-soo Chang, Young-chul Hwang
Estimating the term…
An IC device includes a substrate including a device region having a fin-type active region and a deep trench region; a gate line that extends in a direction intersecting the fin-type active region; and an inter-device isolation layer that fills the deep trench region. The gate line includes a first gate portion that extends on the device region to cover the fin-type active region and has a flat upper surface at a first level and a second gate portion that extends on the deep trench region to cover the inter-device isolation layer while being integrally connected to the first gate portion and has an upper surface at a second level that is closer to the substrate than the first level.
An integrated circuit (IC) device comprising:
An integrated circuit (IC) device comprising:
17-22. (canceled)
An integrated circuit (IC) device comprising:
Dependencies are inferred from the claim text.