Semiconductor image pickup device
AssigneeKabushiki Kaisha Toshiba
InventorHidetoshi KOIKE
Life of this patent
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Abstract
According to one embodiment, a semiconductor image pickup device includes a pixel area and a non-pixel area. The device includes a first photoelectric conversion element formed in the pixel area, a first transistor formed in the pixel area and connected to the first photoelectric conversion element, a second photoelectric conversion element formed in the non-pixel area, a second transistor formed in the non-pixel area and connected to the second photoelectric conversion element, a metal wire formed at least in the non-pixel area, a first cap layer formed on the metal wire to prevent diffusion of metal contained in the metal wire, and a dummy via wire formed in the non-pixel area and penetrating the first cap layer.
Claims12
(canceled)
A semiconductor image pickup device comprising a pixel area including a plurality of pixels arranged in a matrix and a dummy pixel area arranged outside the pixel area, the device comprising:
- a semiconductor substrate;
- a first photoelectric conversion element formed in the pixel area on the semiconductor substrate;
- a first transistor formed in the pixel area and connected to the first photoelectric conversion element;
- a second photoelectric conversion element formed in the non-pixel area on the semiconductor substrate;
- a second transistor formed in the pixel area and connected to the first photoelectric conversion element;
- a first interlayer insulating film formed on the semiconductor substrate;
- a metal contact formed through the first interlayer insulating film and in contact with the semiconductor substrate;
- a first metal wire formed on the first interlayer insulating film and connected to the metal contact;
- a second interlayer insulating film formed on the first metal wire;
- a dummy via wire formed in the dummy pixel area, formed directly above and to face the dummy pixel area, penetrating the second interlayer insulating film, and connected to the first metal wire;
- and
- a second metal wire formed over the dummy via wire and connected to an upper end of the dummy via wire.
Dependencies are inferred from the claim text.