Nonvolatile semiconductor memory device and method of manufacturing the same
AssigneeKabushiki Kaisha Toshiba
InventorsKiwamu SAKUMA, Kensuke OTA, Masumi SAITOH, Chika TANAKA, Daisuke MATSUSHITA
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AssigneeKabushiki Kaisha Toshiba
InventorsKiwamu SAKUMA, Kensuke OTA, Masumi SAITOH, Chika TANAKA, Daisuke MATSUSHITA
Estimating the term…
According to one embodiment, a memory device includes a first stacked layer structure stacked in order of a first insulating layer, a first electrode layer, . . . an n-th insulating layer, an n-th electrode layer, and an (n+1)-th insulating layer in a first direction perpendicular to a surface of a semiconductor substrate, where n is a natural number, an oxide semiconductor layer extending through the first to n-th electrode layers in the first direction, a second stacked layer structure provided between the first to n-th electrode layers and the oxide semiconductor layer, and including a charge storage layer which storages charges, and a area provided in the oxide semiconductor layer.
A nonvolatile semiconductor memory device comprising:
Dependencies are inferred from the claim text.