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US 2016/0079258 A1Published application
Dense arrays and charge storage devices
AssigneeSanDisk 3D LLC
InventorThomas H. Lee
Life of this patent
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Abstract
There is provided a monolithic three dimensional array of charge storage devices which includes a plurality of device levels, wherein at least one surface between two successive levels is planarized by chemical mechanical polishing.
Claims20
A memory device comprising at least one memory cell, wherein each memory cell of the memory device comprises:
- a stack including a first dielectric region, a second dielectric region that is spaced from the first dielectric region, and a charge storage region configured to trap electrical charges and contacting the first dielectric region and the second dielectric region;
- a p-doped region comprising a p-doped semiconductor material and contacting a first horizontal surface of the stack;
- and
- an n-doped region comprising an n-doped semiconductor material,
- wherein at least one of the p-doped region and the n-doped region is in physical contact with the first dielectric region.
2 more elements
Dependencies are inferred from the claim text.