Batch process fabrication of package-on-package microelectronic assemblies
AssigneeInvensas Corporation
InventorsBelgacem Haba, Ilyas Mohammed, Liang Wang
Life of this patent
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Abstract
A microelectronic assembly can be made by joining first and second subassemblies by electrically conductive masses to connect electrically conductive elements on support elements of each subassembly. A patterned layer of photo-imageable material may overlie a surface of one of the support elements and have openings with cross-sectional dimensions which are constant or monotonically increasing with height from the surface of that support element, where the masses extend through the openings and have dimensions defined thereby. An encapsulation can be formed by flowing an encapsulant into a space between the joined first and second subassemblies.
Claims8
A method of fabricating a microelectronic assembly, comprising:
- joining first and second subassemblies to form an assembly, the assembly comprising a first support element and a second support element, the first support element having an outwardly-facing first surface facing a first direction, and the second support element having an outwardly-facing first surface facing a second direction opposite from the first direction, the first support element having electrically conductive first elements at an inwardly-facing second surface thereof, and the second support element having electrically conductive second elements at an inwardly-facing second surface thereof, at least one microelectronic element being mounted overlying the second surface of one of the first and second support elements, a patterned layer of photo-imageable material overlying the second surface of one of the first or second support elements, the patterned layer having openings with cross-sectional dimensions which are constant or increase with height from the surface of the support element over which the patterned layer lies, and the assembly further comprising masses of bonding material extending from the first elements through the openings and electrically coupled with the second elements, the masses having cross-sectional dimensions defined by the cross-sectional dimensions of the openings;
- and
- flowing an encapsulant into a space between the first and second subassemblies to form an encapsulation contacting surfaces of at least portions of the masses.
Dependencies are inferred from the claim text.