Wafer with improved plating current distribution
AssigneeGlobalfoundries Inc.
InventorsThomas Werner, Oliver Aubel, Frank Feustel
Life of this patent
Estimating the term…
Abstract
A semiconductor wafer is provided including a plurality of dies, each of the plurality of dies including a plurality of semiconductor devices, a plurality of die seals, each of the plurality of die seals being formed at a perimeter of one of the plurality of dies, and a plurality of electrically conductive links, each of the plurality of conductive links connecting one of the plurality of die seals with another one of the plurality of die seals.
Claims18
A semiconductor wafer, comprising:
- a plurality of dies, each of said plurality of dies comprising a plurality of semiconductor devices;
- a plurality of die seals, each of said plurality of die seals being formed at a perimeter of one of said plurality of dies;
- and
- a plurality of electrically conductive links, each of said plurality of conductive links connecting one of said plurality of die seals with another one of said plurality of die seals.
A method of manufacture of a semiconductor wafer, comprising the steps of:
- forming a first integrated circuit on a first die of said semiconductor wafer and forming a second integrated circuit on a second die of said semiconductor wafer;
- forming a first die seal at the perimeter of said first die and a second die seal at the perimeter of said second die;
- and
- forming an electrically conductive link between said first and the second die seals.
A method of electroplating a semiconductor wafer, comprising the steps of:
- providing a semiconductor wafer comprising a plurality of dies, each of said plurality of dies comprising a plurality of semiconductor devices, a plurality of die seals, each of said plurality of die seals being formed at a perimeter of one of said plurality of dies, and a plurality of electrically conductive links, each of said plurality of electrically conductive links connecting one of said plurality of die seals with another one of said plurality of die seals;
- immersing said semiconductor wafer in an electrolyte bath containing copper;
- applying a cathode to an edge of said semiconductor wafer;
- immersing an anode in said electrolyte bath;
- and
- applying a voltage to at least one of said cathode and said anode to deposit a copper-based material on the surface of said semiconductor wafer.
Dependencies are inferred from the claim text.