Increasing the gas efficiency for an electrostatic chuck
AssigneeApplied Materials, Inc.
InventorVIJAY D. PARKHE
Life of this patent
Estimating the term…
Abstract
A gas is received through an inlet. A portion of the gas is supplied to an electrostatic chuck. A portion of the gas is re-circulated through a compressor. A pressure of the second portion of the gas is increased. The second portion of the gas is stored in a gas storage.
Claims20
A method to increase the efficiency of a backside gas for an electrostatic chuck comprising:
- receiving the gas through an inlet;
- supplying a first portion of the gas to the electrostatic chuck;
- re-circulating a second portion of the gas through a compressor.
A system to increase the efficiency of a gas for an electrostatic chuck, comprising:
- an inlet to receive the gas;
- a first outlet coupled to the inlet to supply a first portion of the gas to the electrostatic chuck;
- a second outlet coupled to the first outlet to re-circulate a second portion of the gas through a compressor, and a controller coupled to control at least one of the inlet, the first outlet, and the second outlet.
A non-transitory machine readable medium comprising executable program instructions that, when executed by a data processing system, cause the data processing system to perform operations comprising:
- receiving a gas through an inlet;
- supplying a first portion of the gas to an electrostatic chuck;
- re-circulating a second portion of the gas through a compressor.
Dependencies are inferred from the claim text.