Back to results
US 2016/0079099 A1Published application
Substrate treating apparatus
AssigneeSCREEN Semiconductor Solutions Co., Ltd.
InventorsYoshiteru Fukutomi, Tsuyoshi Mitsuhashi, Hiroyuki Ogura, Kenya Morinishi, Yasuo Kawamatsu, Hiromichi Nagashima
Life of this patent
Estimating the term…
Abstract
A substrate treating method for treating substrates with a substrate treating apparatus having an indexer section, a treating section and an interface section includes performing resist film forming treatment in parallel on a plurality of stories provided in the treating section and performing developing treatment in parallel on a plurality of stories provided in the treating section.
Claims18
A substrate treating apparatus comprising:
- a treating block;
- the treating block including a plurality of cells arranged vertically;
- each cell containing:
- treating units for treating substrates;
- and
- a single main transport mechanism disposed in a transporting space for transporting the substrates to the treating units;
- the apparatus comprising a first gas supply pipe for supplying a clean gas into the transport space of each cell.
4 more elements
A substrate treating apparatus comprising:
- a treating block;
- the treating block including a plurality of cells arranged vertically;
- each cell containing:
- treating units for treating substrates;
- and
- a single main transport mechanism disposed in a transporting space for transporting the substrates to the treating units;
- wherein the treating units include solution treating units for treating the substrates with solutions;
- the apparatus comprising a gas supply pipe for supplying a clean gas into the solution treating units.
5 more elements
A substrate treating apparatus comprising:
- a treating block;
- the treating block including a plurality of cells arranged vertically;
- each cell containing:
- treating units for treating substrates;
- and
- a single main transport mechanism disposed in a transporting space for transporting the substrates to the treating units;
- the apparatus comprising a first gas exhaust pipe for exhausting gas from the transport space of each cell.
4 more elements
Dependencies are inferred from the claim text.