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US 2016/0079097 A1Published application
Apparatus for processing semiconductor wafers, in particular for carrying out a polymers removal process step
AssigneeSTMicroelectronics S.r.l.
InventorsDario Tenaglia, Sebastiano Cali
Life of this patent
Estimating the term…
Abstract
An apparatus for processing semiconductor wafers includes at least a wet bench and an automatic handling system of a wafer carrier removably connected thereto. The wet bench includes a first processing tank, a second processing tank and a third processing tank, separated from one another, each processing tank being dedicated to a different chemical, as well as a special cleaning and drying tank for processing the automatic handling system when the wafer carrier has been removed.
Claims22
A method, comprising:
- processing a semiconductor wafer carried by a wafer carrier of an automatic handling system that includes a connector removably coupled to the wafer carrier, the automatic handling system conveying the wafer carrier, the processing including processing the semiconductor wafer using a wet bench that includes a first processing tank, a second processing tank and a third processing tank, separated from one another, the first, second, and third processing tanks being configured to store first, second, and third chemicals, respectively;
- decoupling the wafer carrier from the connector;
- and
- processing the automatic connector using a cleaning and drying tank.
1 more element
A process, comprising:
- uploading semiconductor wafers into a wafer carrier;
- coupling the wafer carrier carrying semiconductor wafers to a connector of an automatic wafer handling system;
- conveying the wafer carrier carrying semiconductor wafers to a first processing tank of a wet bench;
- processing the wafer carrier carrying semiconductor wafers in the first processing tank;
- conveying the wafer carrier carrying semiconductor wafers to a second processing tank of the wet bench;
- processing the wafer carrier carrying semiconductor wafers in the second processing tank;
- conveying the wafer carrier carrying semiconductor wafers to a third processing tank of the wet bench;
- processing the wafer carrier carrying semiconductor wafers in the third processing tank;
- downloading the semiconductor wafers from the wafer carrier;
- conveying the connector to a cleaning and drying tank;
- and
- cleaning and drying the connector in the cleaning and drying tank.
9 more elements
A process, comprising:
- uploading a wafer carrier with semiconductor wafers;
- coupling the wafer carrier to a connector of an automatic wafer handling system configured to convey the wafer carrier;
- dipping said wafer carrier into a hydroxylamine-based solvent of a first processing tank of a wet bench that also includes, a second processing tank and a third processing tank, separated from one another, and a cleaning and drying tank;
- cleaning the wafers using isopropyl alcohol of said second processing tank;
- rinsing the wafers using de-ionized water of said third processing tank;
- downloading the wafers from said wafer carrier;
- and
- cleaning and drying the connector of the automatic handling system.
5 more elements
Dependencies are inferred from the claim text.