Nonvolatile semiconductor storage device and method of manufacturing the same
AssigneeKabushiki Kaisha Toshiba
InventorsHirokazu ISHIGAKI, Masaru Kito
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AssigneeKabushiki Kaisha Toshiba
InventorsHirokazu ISHIGAKI, Masaru Kito
Estimating the term…
A nonvolatile semiconductor storage device includes a stack structure including first insulating films and first electrode films stacked alternately, the stack structure having a first through hole extending therethrough; a second electrode film provided above the stack structure, the second electrode film having a second through hole extending therethrough and communicating with the first through hole; a second insulating film provided above the second electrode film and having a third through hole extending therethrough and communicating with the second through hole; a semiconductor film provided along inner surfaces of the first and the second through holes; a memory film provided between the first electrode film and the semiconductor film; and a gate insulating film provided between the second electrode film and the semiconductor film; the third through hole becoming narrower toward an upper side of the stack direction and wider toward a lower side of a stack direction.
A nonvolatile semiconductor storage device comprising:
A method of manufacturing a nonvolatile semiconductor storage device comprising:
Dependencies are inferred from the claim text.