Elliptical wafer manufacture
AssigneeInternational Business Machines Corporation
InventorsStephen P. Ayotte, Dylan J. Fath, Michael C. Johnson, Travis S. Longenbach, Nicolas E. Pizzuti
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Abstract
An approach to manufacturing an elliptical semiconductor wafer includes a structure for an elliptical semiconductor wafer with a crystal direction, wherein the crystal direction is provided by a seed crystal orientation. The structure of the elliptical semiconductor wafer has a minor radius for the elliptical semiconductor wafer and a major radius for the elliptical semiconductor wafer wherein the major radius is greater than the minor radius.
Claims20
An elliptical semiconductor wafer, comprising:
- a crystal direction, wherein the crystal direction is provided by a seed crystal orientation;
- and
- a minor radius for the elliptical semiconductor wafer and a major radius for the elliptical semiconductor wafer, wherein the major radius is greater than the minor radius.
An elliptical silicon on insulator semiconductor wafer, comprising:
- one or more elliptical semiconductor wafers;
- a crystal direction, wherein the crystal direction is provided by a seed crystal orientation;
- a minor radius for each of the one or more elliptical semiconductor wafers and a major radius for each of the one or more elliptical semiconductor wafers, wherein the major radius is greater than the minor radius;
- and
- an insulating layer in one of the one or more elliptical semiconductor wafers.
A method of manufacture of an elliptical semiconductor wafer, the method comprising:
- orienting a seed crystal;
- growing a boule from the seed crystal;
- determining a wafer saw angle less than ninety degrees to a longitudinal axis of the boule;
- slicing the boule at the determined wafer saw angle to create an elliptical semiconductor wafer;
- and
- performing elliptical wafer finishing operations on the elliptical semiconductor wafer.
Dependencies are inferred from the claim text.