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US 2016/0079040 A1Published application
Plasma Processing Devices Having a Surface Protection Layer
AssigneeSamsung Electronics Co., Ltd.
InventorsMyoungSoo Park, Hakyoung Kim, Yumi Sung, Seungkyu Lim
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Abstract
Plasma processing devices may include a process chamber body, a substrate support unit in a lower portion of the process chamber body, and a window part in an upper portion of the process chamber body. The window part may include a base layer and a surface protection layer on the base layer and configured to face the substrate support unit. The surface protection layer may include an oxide having a columnar structure.
Claims20
A plasma processing device, comprising:
- a process chamber body;
- a substrate support unit in a lower portion of the process chamber body;
- and
- a window part in an upper portion of the process chamber body,
- wherein the window part comprises a base layer and a surface protection layer on the base layer and configured to face the substrate support unit, and
- wherein the surface protection layer comprises an oxide having a columnar structure.
3 more elements
A plasma processing device, comprising:
- a process chamber body;
- and
- a window part in an upper portion of the process chamber body, configured to maintain a processing space of the process chamber body in a vacuum state, and
- wherein the window part comprises a base layer and a surface protection layer on the base layer, and
- wherein the surface protection layer comprises an oxide layer formed by a vapor deposition process.
2 more elements
A plasma processing device, comprising:
- a process chamber body having a first surface protection layer on a surface of the process chamber body;
- and
- a window part in an upper portion of the process chamber body, the window part further comprising:
- a base layer, and
- a second surface protection layer on the base layer,
- wherein the second surface protection layer comprises an oxide layer formed by a vapor deposition process.
3 more elements
Dependencies are inferred from the claim text.