Plasma processing apparatus and filter unit
AssigneeTokyo Electron Limited
InventorNaohiko OKUNISHI
Life of this patent
Estimating the term…
Abstract
A filter unit 54(IN) includes a housing 82 formed of a cylindrical conductor. Further, in the housing 82, the air-core solenoid coils AL1 and BL1; the first capacitors AC1 and BC1; the troidal coils AL2 and BL2; and the second capacitors AC2 and BC2 are arranged in this sequence from top to bottom. In the vicinity of the air-core solenoid coils AL1 and BL1, a multiple number of rod-shaped comb-teeth members 86, which are extended in parallel to a coil axis direction, are provided adjacent to outer peripheries of the air-core solenoid coils AL1 and BL1 at a regular interval in a circumferential direction thereof. A comb teeth M are formed on an inner surface of each comb-teeth member 86, and the comb teeth M are inserted into winding gaps of the air-core solenoid coils AL1 and BL1.
Claims20
A plasma processing apparatus, including an external circuit of a power meter or a signal meter electrically connected via a line to an electrical member within a processing vessel in which a plasma process is performed, configured to reduce or block noises of multiple high frequency powers of different frequencies introduced from the electrical member into the line toward the external circuit by a filter provided on the line,
- wherein the filter comprises:
- an air-core solenoid coil provided at an uppermost portion of the filter, when viewed from a side of the electrical member, and configured to block noises of a single or plural high frequency powers among the multiple high frequency powers except a high frequency power having a lowest frequency;
- insulating comb teeth inserted in winding gaps of the air-core solenoid coil locally at plural positions in a circumferential direction thereof;
- a coil having a core connected in series to the air-core solenoid coil, and configured to block a noise of the high frequency power having the lowest frequency;
- and
- a cylindrical conductor, accommodating or surrounding at least the air-core solenoid coil, configured to form, by being combined with the air-core solenoid coil, a distributed constant line in which parallel resonance occurs at multiple frequencies.
A plasma processing apparatus, including an external circuit of a power meter or a signal meter electrically connected via a line to an electrical member within a processing vessel in which a plasma process is performed, configured to reduce or block noises of multiple high frequency powers of different frequencies introduced from the electrical member into the line toward the external circuit by a filter provided on the line,
- wherein the filter comprises:
- an air-core solenoid coil provided at an uppermost portion of the filter, when viewed from a side of the electrical member, and configured to block noises of a single or plural high frequency powers among the multiple high frequency powers except a high frequency power having a lowest frequency;
- insulating comb teeth inserted in winding gaps of a first section of the air-core solenoid coil locally at plural positions in a circumferential direction thereof;
- a coil tube configured to block winding gaps of a second section of the air-core solenoid coil in the entire circumferential direction;
- a coil having a core connected in series to the air-core solenoid coil, and configured to block a noise of the high frequency power having the lowest frequency;
- and
- a cylindrical conductor, accommodating or surrounding at least the air-core solenoid coil, configured to form, by being combined with the air-core solenoid coil, a distributed constant line in which parallel resonance occurs at multiple frequencies.
A plasma processing apparatus, including an external circuit of a power meter or a signal meter electrically connected via a line to an electrical member within a processing vessel in which a plasma process is performed, configured to reduce or block noises of multiple high frequency powers of different frequencies introduced from the electrical member into the line toward the external circuit by a filter provided on the line,
- wherein the filter comprises:
- an air-core solenoid coil provided at an uppermost portion of the filter, when viewed from a side of the electrical member, and configured to block noises of a single or plural high frequency powers among the noises of the multiple high frequency powers except a high frequency power having a lowest frequency;
- a first coil tube, having a first dielectric constant, configured to block winding gaps of a first section of the air-core solenoid coil entirely in a circumferential direction;
- a second coil tube, having a second dielectric constant, configured to block winding gaps of a second section of the air-core solenoid coil entirely in the circumferential direction;
- a coil having a core connected in series to the air-core solenoid coil, and configured to block a noise of the high frequency power having the lowest frequency;
- and
- a cylindrical conductor, accommodating or surrounding at least the air-core solenoid coil, configured to form, by being combined with the air-core solenoid coil, a distributed constant line in which parallel resonance occurs at multiple frequencies.
A filter unit, within a plasma processing apparatus in which an electrical member within a processing vessel in which a plasma process is performed is electrically connected via a line to an external circuit provided outside the processing vessel, provided on the line to reduce or block noises of multiple high frequency powers of different frequencies introduced from the electrical member into the line toward the external circuit, the filter unit comprising:
- an air-core solenoid coil provided at an uppermost portion of the filter, when viewed from a side of the electrical member, and configured to block noises of a single or plural high frequency powers among the noises of the multiple high frequency powers except a high frequency power having a lowest frequency;
- insulating comb teeth inserted in winding gaps of the air-core solenoid coil locally at plural positions in a circumferential direction thereof;
- a coil having a core connected in series to the air-core solenoid coil, and configured to block a noise of the high frequency power having the lowest frequency;
- and
- a cylindrical conductor, accommodating or surrounding at least the air-core solenoid coil, configured to form, by being combined with the air-core solenoid coil, a distributed constant line in which parallel resonance occurs at multiple frequencies.
A filter unit, within a plasma processing apparatus in which a heating element provided in a first electrode within a processing vessel in which a plasma process is performed is electrically connected via a power feed line to a heater power supply provided outside the processing vessel, provided on the power feed line to reduce or block noises of multiple high frequency powers of different frequencies introduced from the heating element into the power feed line toward the heater power supply, the filter unit comprising:
- an air-core solenoid coil provided at an uppermost portion of the filter, when viewed from a side of the heating element, and configured to block noises of a single or plural high frequency powers among the multiple high frequency powers except a high frequency power having a lowest frequency;
- insulating comb teeth inserted in winding gaps of a first section of the air-core solenoid coil locally at plural positions in a circumferential direction thereof;
- a coil tube configured to block winding gaps of a second section of the air-core solenoid coil entirely in the circumferential direction;
- a coil having a core connected in series to the air-core solenoid coil, and configured to block a noise of the high frequency power having the lowest frequency;
- and
- a cylindrical conductor, accommodating or surrounding at least the air-core solenoid coil, configured to form, by being combined with the air-core solenoid coil, a distributed constant line in which parallel resonance occurs at multiple frequencies.
A filter unit, within a plasma processing apparatus in which an electrical member within a processing vessel in which a plasma process is performed is electrically connected via a line to an external circuit provided outside the processing vessel, provided on the line to reduce or block noises of multiple high frequency powers of different frequencies introduced from the electrical member into the line toward the external circuit, the filter unit comprising:
- an air-core solenoid coil provided at an uppermost portion of the filter, when viewed from a side of the electrical member, and configured to block noises of a single or plural high frequency powers among the multiple high frequency powers except a high frequency power having a lowest frequency;
- a first coil tube, having a first dielectric constant, configured to block winding gaps of a first section of the air-core solenoid coil entirely in a circumferential direction;
- a second coil tube, having a second dielectric constant, configured to block winding gaps of a second section of the air-core solenoid coil entirely in the circumferential direction;
- a coil having a core connected in series to the air-core solenoid coil, and configured to block a noise of the high frequency power having the lowest frequency;
- and
- a cylindrical conductor, accommodating or surrounding at least the air-core solenoid coil, configured to form, by being combined with the air-core solenoid coil, a distributed constant line in which parallel resonance occurs at multiple frequencies.
Dependencies are inferred from the claim text.