AutoSlice and View Undercut Method
AssigneeFEI Company
InventorsRichard Glen Ivy Passey, John C. McNeil
Life of this patent
Estimating the term…
Abstract
A method is provided for slice and view processing of samples with dual beam systems. The slice and view processing includes providing a location for particles and material resulting from the slice and view process to collect without obscuring the sample face to be viewed and imaged. This location is formed as an undercut located beneath or in front of the sample face.
Claims16
A method of processing a sample by slice and view processing with a dual beam system, comprising:
- locating an area of interest in the sample for viewing and imaging;
- exposing a face in the sample by removing material to create a trench;
- isolating the area of interest by removing material to form side trenches on each side of the area of interest;
- and
- creating a location for collecting particles resulting from the slice and view processing without obscuring the sample face.
A method of processing a sample by slice and view processing with a dual beam system, comprising:
- directing an ion beam toward a substrate to mill a trench in the substrate, the trench exposing a wall having an area of interest around a feature to be observed;
- and
- directing the ion beam toward the substrate to mill a location for collecting particles resulting from the slice and view processing without obscuring the area of interest.
A method of processing a sample by slice and view processing with a dual beam system, comprising:
- directing an ion beam toward a substrate to form a trench in the substrate, the trench exposing a face in an area of interest of the sample to be observed;
- directing the ion beam toward the substrate to form an undercut extending lower than the trench;
- directing an electron beam toward the face to form an image of the face;
- directing the ion beam to perform a milling operation by sequentially removing a plurality of slices from the area of interest revealing a new face with each new slice for viewing by the electron beam;
- wherein particles resulting from the milling operation are deposited and collected within the undercut without obscuring the face for viewing by the electron beam.
Dependencies are inferred from the claim text.