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US 2016/0078608 A1Published application
Reticle inspection apparatus and method
AssigneeSamsung Electronics Co., Ltd.
InventorsJi-Hoon NA, Byung-Gook KIM, Hyuk-Joo KWON
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Abstract
A reticle inspection apparatus includes a reticle, an image generator to generate images of a surface of the reticle, and an image processor to compare first and second images generated by the image generator. The first image is generated when a pellicle is not on the reticle and the second image is generated when the pellicle is on the reticle.
Claims20
A reticle inspection apparatus, comprising:
- a reticle;
- an image generator to generate images of a surface of the reticle;
- and
- an image processor to compare first and second images generated by the image generator, wherein the first image is to be generated when a pellicle is not on the reticle and the second image is to be generated when the pellicle is on the reticle.
1 more element
A reticle inspection apparatus, comprising:
- a reticle;
- a pellicle on the reticle to transmit extreme ultraviolet (EUV) light;
- an image generator to generate first and second images of a surface of the reticle;
- a storage area to store the first and second images;
- and
- an image processor to compare the first and second images, wherein the first image is to be generated when the pellicle is not on the reticle and the second image is to be generated when the pellicle is on the reticle.
3 more elements
An apparatus, comprising:
- an interface coupled to an image generator;
- and
- logic coupled to the interface to determine existence of a defect on a pellicle or adjacent or on a reticle based on a first signal and a second signal, the first signal corresponding to a first image and the second signal corresponding to a second image, the first image to be generated when the pellicle is not on the reticle and the second image to be generated when the pellicle is on the reticle.
Dependencies are inferred from the claim text.