Management apparatus, substrate processing system and non-transitory computer-readable recording medium

A substrate processing system comprising:

• a substrate processing device configured to store a device information for processing a substrate;
• and
• a management apparatus connected to the substrate processing device, the management apparatus comprising:
• a manipulation & display unit including a user interface for selecting a reference device information, and configured to display:
• a difference between the device information obtained from the substrate processing device and the reference device information selected via the user interface;
• a content of the reference device information;
• and a content of the device information, and further configured to receive a command for modifying the device information;
• and
• a control unit configured to modify the device information based on the command received from the manipulation & display unit and configured to transmit a modified device information to the substrate processing device.

A non-transitory computer-readable recording medium storing therein a device information update program causing a computer to perform:

• (a) determining a difference between a device information for processing a substrate obtained from a substrate processing device and a reference device information;
• (b) displaying the difference, a content of the reference device information and a content of the device information;
• (c) receiving a command for modifying the device information;
• and
• (d) modifying the device information based on the command and transmitting a modified device information to the substrate processing device.