Resonation element, resonator, oscillator, electronic device and moving object
AssigneeSeiko Epson Corporation
InventorAkinori YAMADA
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AssigneeSeiko Epson Corporation
InventorAkinori YAMADA
Estimating the term…
A resonation element includes a basal portion, resonating arms extending out in a Y-axis direction from the basal portion, and a vibration substrate, formed of single crystal silicon, in which a Z-axis direction is set to a thickness direction, and is configured such that the resonating arms are flexurally vibrated in an XY in-plane direction. In addition, when resonation frequencies of the resonating arms are set to F [kHz], widths of the resonating arms are set to W [μm], and lengths of the resonating arms are set to L [μm], at least one expression of the following Expression (1) and the following Expression (2) is satisfied. W<10A×Log (F)+B (1) where, A is −5.006×10−1, and B is 2.451, and L<10C×Log (F)+D (2) where, C is −7.507×10−1, and D is 4.268.
A resonation element comprising:
Dependencies are inferred from the claim text.