Production management apparatus, production management method and recording medium
AssigneeKabushiki Kaisha Toshiba
InventorsKensuke TAKAHASHI, Katsumi YAMADA
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Abstract
In one embodiment, a production management apparatus includes a flow obtaining module configured to obtain a plurality of processing flows to process a wafer from a flow storage module. The apparatus further includes a route creating module configured to select a plurality of steps from the plurality of processing flows, and configured to create a processing route to execute the plurality of steps selected from the plurality of processing flows. The apparatus further includes a flow creating module configured to select a plurality of steps from the processing route, and configured to create a new processing flow including the plurality of steps selected from the processing route.
Claims20
A production management apparatus comprising:
- a flow obtaining module configured to obtain a plurality of processing flows to process a wafer from a flow storage module;
- a route creating module configured to select a plurality of steps from the plurality of processing flows, and configured to create a processing route to execute the plurality of steps selected from the plurality of processing flows;
- and
- a flow creating module configured to select a plurality of steps from the processing route, and configured to create a new processing flow including the plurality of steps selected from the processing route.
A production management apparatus comprising:
- an edit screen display module configured to display an edit screen capable of editing first to Nth processing flows to process first to Nth wafers respectively where N is an integer of two or more, the edit screen including first to Nth editing areas which respectively display steps of the first to Nth processing flows and are respectively capable of editing the steps of the first to Nth processing flows;
- and
- a flow registry module configured to register the first to Nth processing flows edited on the edit screen in a flow storage module.
A production management method comprising:
- obtaining a plurality of processing flows to process a wafer from a flow storage module;
- selecting a plurality of steps from the plurality of processing flows and creating a processing route to execute the plurality of steps selected from the plurality of processing flows;
- and
- selecting a plurality of steps from the processing route and creating a new processing flow including the plurality of steps selected from the processing route.
A production management method, comprising:
- displaying an edit screen capable of editing first to Nth processing flows to process first to Nth wafers respectively where N is an integer of two or more, the edit screen including first to Nth editing areas which respectively display steps of the first to Nth processing flows and are respectively capable of editing the steps of the first to Nth processing flows;
- and
- registering the first to Nth processing flows edited on the edit screen in a flow storage module.
A non-transitory computer-readable recording medium containing a program which causes a computer to execute a production management method, the method comprising:
- obtaining a plurality of processing flows to process a wafer from a flow storage module;
- selecting a plurality of steps from the plurality of processing flows and creating a processing route to execute the plurality of steps selected from the plurality of processing flows;
- and
- selecting a plurality of steps from the processing route and creating a new processing flow including the plurality of steps selected from the processing route.
A non-transitory computer-readable recording medium containing a program which causes a computer to execute a production management method, the method comprising:
- displaying an edit screen capable of editing first to Nth processing flows to process first to Nth wafers respectively where N is an integer of two or more, the edit screen including first to Nth editing areas which respectively display steps of the first to Nth processing flows and are respectively capable of editing the steps of the first to Nth processing flows;
- and
- registering the first to Nth processing flows edited on the edit screen in a flow storage module.
Dependencies are inferred from the claim text.