Glass substrate transfer system and robot arm thereof

A robot arm comprising:

• a substrate fork, configured for taking a glass substrate;
• a moving assembly, connected with the substrate fork and configured for making the substrate fork to be moved in a working space;
• a vacuum chuck, disposed on the substrate fork and configured for sucking the glass substrate;
• a heat-dissipating assembly, disposed at a side of the substrate fork, the moving assembly or the vacuum chuck and configured for being moved to above the vacuum chuck to dissipate heat of the vacuum chuck when the vacuum chuck is heated and does not suck the glass substrate.

A glass substrate transfer system comprising:

• a high-temperature furnace and another process machine;
• a substrate fork, configured for taking a glass substrate;
• a moving assembly, connected with the substrate fork and configured for making the substrate fork to be moved in a working space;
• a vacuum chuck, disposed on the substrate fork and configured for sucking the glass substrate;
• a heat-dissipating assembly, disposed at a side of the high-temperature furnace, the another process machine, the substrate fork, the moving assembly or the vacuum chuck and configured for being moved to above the vacuum chuck to dissipate heat of the vacuum chuck when the vacuum chuck is heated and does not suck the glass substrate.