# US 2016/0061526 A1 · Magnetic annealing apparatus

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 2016/0061526 A1
- Document ID: US20160061526A1
- Status: Published application
- Kind: A1
- Application number: 14/840,486
- Filed: 2015-08-31
- Published: 2016-03-03
- Earliest claimed: 2014-09-03
- Assignees: Tokyo Electron Limited
- Applicants: Tokyo Electron Limited
- Inventors: Mitsuru Yamazaki; Barry Clarke; Ian Colgan; George Eyres; Ioan Domsa
- Web page: https://patentgrep.com/patent/US20160061526A1

## CPC

- F27B 17/0025: {specially adapted for treating semiconductor wafers}
- F27B 5/08: Arrangements of linings
- F27D 99/0001: {Heating elements or systems}
- H10N 50/01: Manufacture or treatment
- H10P 72/0436: {mainly by radiation}
- H10P 72/3311: {Horizontal transfer of a batch of workpieces}
- F27B 17/005: {with cylindrical chambers}
- F27D 5/0037: {Supports specially adapted for semi-conductors}
- H10P 72/13: {Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements}
- F27B: FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27D: DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

Disclosed is a magnetic annealing apparatus including a processing container having a horizontally-elongated tubular shape and configured to perform a magnetic annealing processing on a plurality of substrates accommodated therein in a magnetic field; a heating unit provided to cover at least a part of a surface of the processing container that extends in a longitudinal direction, from outside; a magnet provided to cover the heating unit from the outside of the heating unit; a substrate holder configured to hold the plurality of substrates within the processing container; and a heat shielding plate provided to surround a part of the substrate holder.

## Claims

### Claim 1

A magnetic annealing apparatus comprising:
a processing container having a horizontally-elongated tubular shape, and configured to perform a magnetic annealing processing on a plurality of substrates accommodated therein in a magnetic field;
a heating unit provided to cover at least a part of a surface of the processing container that extends in a longitudinal direction, from outside;
a magnet provided to cover the heating unit from the outside of the heating unit;
a substrate holder configured to hold the plurality of substrates within the processing container; and
a heat shielding plate provided to surround a part of the substrate holder.

### Claim 2 (depends on 1)

The magnetic annealing apparatus of claim 1, wherein the heat shielding unit is provided at a position where the heat shielding unit does not face the heating unit.

### Claim 3 (depends on 2)

The magnetic annealing apparatus of claim 2, wherein the position where the heat shielding unit does not face the heating unit corresponds to an end surface extending in a direction substantially perpendicular to the longitudinal direction.

### Claim 4 (depends on 1)

The magnetic annealing apparatus of claim 1, wherein the substrate holder is configured to hold the plurality of substrates at predetermined intervals along the longitudinal direction in a substantially vertically standing state.

### Claim 5 (depends on 1)

The magnetic annealing apparatus of claim 1, wherein the substrate holder is configured to hold the plurality of substrates at predetermined intervals in the vertical direction in a substantially horizontally placed state so as to form a loaded body.

### Claim 6 (depends on 5)

The magnetic annealing apparatus of claim 5, wherein the substrate holder is configured to hold a plurality of loaded bodies in parallel with each other along the longitudinal direction.

### Claim 7 (depends on 5)

The magnetic annealing apparatus of claim 5, wherein the heating unit covers substantially the whole of the surface of the processing container that extends in the longitudinal direction.

### Claim 8 (depends on 7)

The magnetic annealing apparatus of claim 7, wherein the heat shielding plate is provided to cover each of the uppermost surface and the lowermost surface of the plurality of substrates through the substrate holder.

### Claim 9 (depends on 1)

The magnetic annealing apparatus of claim 1, wherein the heat shielding plate is constituted with a non-magnetic metal plate.

### Claim 10 (depends on 9)

The magnetic annealing apparatus of claim 9, wherein the heat shielding plate includes a plurality of thin metal plates.

### Claim 11 (depends on 10)

The magnetic annealing apparatus of claim 10, wherein the plurality of thin metal plates are arranged at predetermined intervals with spacers being interposed therebetween.

### Claim 12 (depends on 2)

The magnetic annealing apparatus of claim 2, wherein the heat shielding plate includes a plurality of louver-shaped slits formed by cutting and bending.

### Claim 13 (depends on 1)

The magnetic annealing apparatus of claim 1, wherein a length of the heating unit in the longitudinal direction is 1.7 times that of the substrate holder or more.

### Claim 14 (depends on 1)

The magnetic annealing apparatus of claim 1, wherein the processing container has a cylindrical shape.