Techniques for fabricating diamond nanostructures
AssigneeThe Trustees of Columbia University in the City of New York
InventorsOphir Gaathon, Dirk R. Englund, Jonathan Hodges, Luozhou Li, Matthew Trushem
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Abstract
Techniques for fabricating diamond nanostructures including application of a self-assembled hard mask to a surface of a diamond substrate to define a pattern of masked regions having a predetermined diameter surrounded by an exposed portion. The exposed portion can be vertically etched to a predetermined depth using inductively coupled plasma to form a plurality of nanoposts corresponding to the masked regions. The nanoposts can be harvested to obtain a nanostructure with a diameter corresponding to the predetermined diameter and a length corresponding to the predetermined depth.
Claims25
A method for fabricating diamond nanostructures, comprising:
- applying a hard mask to a surface of a diamond substrate to define thereon a pattern of masked regions having a predetermined diameter surrounded by at least one exposed portion;
- vertically etching the exposed portion of the diamond structure to at least the predetermined depth to thereby form a plurality of nanoposts corresponding to the masked regions;
- and
- harvesting at least one nanopost from the diamond substrate, thereby obtaining a nanostructure having a diameter corresponding to the predetermined diameter, and a length corresponding to the predetermined depth.
A system for fabricating diamond nanostructures using a diamond substrate, comprising:
- a masking device, adapted for operational coupling to the diamond substrate, and for applying a hard mask to a surface of the diamond substrate to define thereon a pattern of masked regions having a predetermined diameter surrounded by at least one exposed portion;
- an etching device, adapted for operational coupling to the diamond substrate, and for vertically etching the exposed portion to at least the predetermined depth to thereby form a plurality of nanoposts corresponding to the masked regions;
- and
- a harvesting device, adapted for operational coupling to the diamond structure, and for harvesting at least one nanopost from the diamond substrate to obtain a nanostructure having a diameter corresponding to the predetermined diameter, and a length corresponding to the predetermined depth.
Dependencies are inferred from the claim text.