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US 2016/0049288 A1Published application
Transmission window for a vacuum ultraviolet gas discharge lamp
AssigneeInternational Iberian Nanotechnology Laboratory
InventorPieter De Beule
Life of this patent
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Abstract
A transmission window (1) for a VUV gas discharge lamp is defined which comprises a substrate (3) which is transparent to the VUV spectrum and a nanolayer stack (2) provided on the substrate, the nanolayer stack (2) comprising at least one nanolayer and the top layer of the nanolayer stack being electrically conducting. Also, a VUV gas discharge lamp, a photo-ionization device and a photo-ionization detector comprising said transmission window are defined.
Claims15
A vacuum ultraviolet (VUV) gas discharge lamp comprising:
- a glass enclosure containing a low pressure gas;
- and
- a VUV transmission window, wherein the VUV transmission window comprises:
- a VUV transparent substrate, and
- a nanolayer stack adjacent to the VUV-transparent substrate, wherein the nanolayer stack comprises at least one nanolayer, and at least a top nanolayer of the nanolayer stack is conductive.
2 more elements
Photo-ionization device, comprising
- a glass enclosure containing a low pressure gas;
- a VUV transmission window, wherein the VUV transmission window comprises:
- a VUV-transparent substrate, and
- a nanolayer stack adjacent to the VUV-transparent substrate, wherein the nanolayer stack comprises at least one nanolayer, and at least a top nanolayer of the nanolayer stack is conductive and
- an excitation device configured to excite the low pressure gas contained in the glass enclosure.
2 more elements
Dependencies are inferred from the claim text.