# US 2016/0041194 A1 · Acceleration sensor structure and use thereof

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- Number: US 2016/0041194 A1
- Document ID: US20160041194A1
- Status: Published application
- Kind: A1
- Application number: 14/920,566
- Filed: 2015-10-22
- Published: 2016-02-11
- Earliest claimed: 2012-01-12
- Assignees: Murata Electronics Oy
- Applicants: Murata Electronics Oy
- Inventors: Ville Pekka RYTKÖNEN; Leif ROSCHIER; Anssi BLOMQVIST
- Web page: https://patentgrep.com/patent/US20160041194A1

## CPC

- G01P 15/125: by capacitive pick-up
- G01P 1/00: Details of instruments
- G01P 15/00: Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P 15/02: by making use of inertia forces {using solid seismic masses}(G01P15/14 takes precedence)
- G01P 15/18: in two or more dimensions
- G01P 2015/0831: {the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration}
- G01P: MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT (measuring or recording blood flow A61B5/02, A61B8/06; monitoring speed or deceleration of electrically-propelled vehicles B60L3/00; vehicle lighting systems adapted to indicate speed B60Q1/54; determining position or course in navigation, measuring ground distance in geodesy or surveying G01C; combined measuring devices for measuring two or more variables of movement G01C23/00; measuring velocity of sound G01H; measuring velocity of light G01J7/00; measuring direction or velocity of solid objects by reception or emission of radiowaves or other waves and based on propagation effects, e.g. Doppler effect, propagation time, direction of propagation, G01S; measuring speed of nuclear radiation G01T; measuring acceleration of gravity G01V; {measuring or recording the speed of trains B61L23/00; speed indicators incorporated in motor vehicles B60K35/00; measuring frequency or phase G01R; traffic control G08G})

## Abstract

A MEMS-sensor structure comprising first means and second means coupled for double differential detection and positioned symmetrically to provide quantities for the double differential detection in a phase shift. If the sensor deforms, due to a specifically symmetric positioning of the first and second means, the effect of the displacement is at least partly eliminated.

## Claims

### Claim 1

A sensor structure matrix, comprising sensor cells with a planar structure, wherein said sensor cells are arranged into a common plane to detect acceleration components in the common plane,
a pair of sensor cells is arranged for detection in a first in-plane direction;
a pair of sensor cells is arranged for detection in a second in-plane direction, wherein the second in-plane direction is perpendicular to the first direction; and
the pairs of sensor cells are positioned to provide compensating symmetry in the common plane of the sensor structure matrix.

### Claim 2 (depends on 1)

A sensor structure matrix of claim 1, wherein also each of the sensor cells is implemented with internal compensating symmetry.

### Claim 3 (depends on 1)

A sensor structure matrix of claim 1, wherein the sensor cells are implemented without internal compensating symmetry.

### Claim 4 (depends on 1)

A sensor structure matrix of claim 1, wherein said sensor cells are arranged into a two-by-two matrix, in which sensor cells of each pair of sensor cells occupy crosswise positions.