Data Reader with Tuned Microstructure
AssigneeSeagate Technology LLC
InventorsQing He, Mark William Covington, Mark Thomas Kief
Life of this patent
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Abstract
A data reader may be configured with a tuned microstructure by initially cooling a substrate to a temperature of 100K or lower and subsequently depositing at least one layer of a data reader on the substrate while the substrate is maintained at the temperature. The tuned microstructure may consist of at least a grain size, grain size distribution, interface quality between multiple layers of the data reader, resistance-area product, and magnetoresistance.
Claims20
A method comprising:
- cooling a substrate to a temperature of 100K or lower;
- and
- depositing at least one layer of a data reader on the substrate while the substrate is maintained at the temperature to provide a tuned microstructure, the tuned microstructure comprising a grain size, grain size distribution, interface quality between multiple layers of the data reader, resistance-area product, and magnetoresistance.
A method comprising:
- cooling a substrate to a temperature of 100K or lower in a first chamber;
- and
- depositing at least one layer of a first data reader on the substrate in a second chamber while the substrate is maintained at the temperature to provide a tuned microstructure, the tuned microstructure comprising a grain size, grain size distribution, interface quality between multiple layers of the data reader, resistance-area product, and magnetoresistance.
An apparatus comprising a data reader positioned on a substrate, at least one layer of the data reader having a tuned microstructure in response to the substrate being maintained at a temperature of 100K or lower, the tuned microstructure comprising a grain size, grain size distribution, interface quality between multiple layers of the data reader, resistance-area product and magnetoresistance.
Dependencies are inferred from the claim text.