Back to results
US 2016/0023861 A1Published application
Tape sticking apparatus and tape sticking method
AssigneesEbara Corporation, Is Engineering Co., Ltd.
InventorsKenya ITO, Keisuke UCHIYAMA, Tomiichi MATSUI, Mahito SHIBUYA
Life of this patent
Estimating the term…
Abstract
A tape sticking apparatus for sticking a masking tape for protecting a peripheral portion of a substrate, such as a wafer, is disclosed. The tape sticking apparatus includes: a substrate holder configured to hold and rotate a substrate; and a tape sticking unit configured to stick a masking tape onto a peripheral portion of the substrate held on the substrate holder.
Claims16
A tape sticking apparatus comprising:
- a substrate holder configured to hold and rotate a substrate;
- and
- a tape sticking unit configured to stick a masking tape onto a peripheral portion of the substrate held on the substrate holder.
A tape sticking method comprising:
- sticking a masking tape onto a peripheral portion of a substrate while rotating the substrate.
Dependencies are inferred from the claim text.