Vertical Hall Device
AssigneeSenis AG
InventorsSasa Dimitrijevic, Radivoje Popovic
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Abstract
A vertical Hall device has a deep N-well, two inner contacts, two outer contacts and, optionally, a central contact disposed at a surface of the deep N-well and arranged along a straight symmetry line. The vertical Hall device is designed according to the invention to have an effective width of the outer contacts that is bigger than an effective width of the inner contacts. A shallow highly doped P+ stripe may be disposed between the inner contacts or between each of the inner contacts and the central contact. These measures help to balance the resistances of the Wheatstone bridge which describes the electrical characteristics of the vertical Hall device.
Claims8
A vertical Hall device having a deep N-well, two inner contacts and two outer contacts disposed at a surface of the deep N-well and arranged along a straight symmetry line, wherein the two inner contacts have a same length and a same effective width and the two outer contacts have a same length and a same effective width, wherein the lengths are measured along the straight symmetry line and the widths are measured perpendicularly to the straight symmetry line, and wherein the contacts are arranged symmetrically with respect to a central symmetry plane, and wherein the effective width of the outer contacts is bigger than the effective width of the inner contacts.
Dependencies are inferred from the claim text.