Actuators and microlithography projection exposure systems and methods using the same

An actuator, comprising:

• a housing;
• a movable part;
• and
• an advancing unit that is at least temporarily connected to the movable part, the advancing unit comprising:
• a deformation unit;
• and
• a deformer configured to deform the deformation unit with a vector component perpendicular to an effective direction of the actuator so that a total length of the deformation unit changes in the effective direction of the actuator as a result of the deformation,
• wherein:
• the movable part is configured to move in the effective direction of the actuator upon a removal of the vector component on the deformation unit;
• the housing comprises two housing parts configured to be interconnected via the deformation unit;
• and
• the two housing parts are moveable with respect to each other along the effective direction of the actuator.

A method of operating an actuator, the actuator comprising a housing, a movable part, a deformation unit and a deformer, the method comprising:

• fixing the movable part via a first locking unit of a first part of the housing, the first locking unit being located upstream of the deformation unit with respect to a direction of movement of the movable part;
• releasing a second locking unit of the second part of the housing, the second locking unit being located downstream of the deformation unit with respect to the direction of movement of the movable part;
• deforming the deformation unit via the deformer;
• fixing the movable part via the second locking unit;
• releasing the first locking unit;
• and
• releasing the deformer from the deformation unit so that the moveable part moves in an effective direction of the actuator, the deformation unit is disposed along an effective direction of the actuator upon releasing of the deformer from the deformation unit,
• wherein the method includes moving the first and second housing parts with respect to each other along the effective direction of the actuator.

An actuator, comprising:

• a housing comprising two parts;
• a movable part;
• a deformation unit;
• and
• a deformer configured to deform the deformation unit with a vector component perpendicular to an effective direction of the actuator so that a total length of the deformation unit changes in the effective direction of the actuator as a result of the deformation,
• wherein the deformation unit is connected to the two parts of the housing and not to the movable part so that the movable part can move in relation to the two parts of the housing over an unrestricted distance.

A method of operating an actuator, the actuator comprising a housing, a movable part, a deformation unit and a deformer, the housing comprising two parts connected via the deformation unit, the method comprising:

• fixing the movable part via a first locking unit, the first locking unit being located upstream of the deformation unit with respect to a direction of movement of the movable part;
• releasing a second locking unit of the movable part, the second locking unit being located downstream of the deformation unit with respect to the direction of movement of the movable part;
• deforming the deformation unit via a deformer;
• fixing the movable part via the second locking unit;
• releasing the first locking unit;
• and
• releasing the deformer from the deformation unit so that the moveable part is movable in an effective direction of the actuator over an unrestricted distance.