Micro pick up array pivot mount with integrated strain sensing elements
AssigneeLuxVue Technology Corporation
InventorsStephen P. Bathurst, Paul Argus Parks, Nile Alexander Light
Life of this patent
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Abstract
Systems and methods for aligning a transfer head assembly with a substrate are disclosed. In an embodiment a pivot mount is used for generating a feedback signal in a closed-loop motion control system. In an embodiment, the pivot mount includes a plurality of spring arms, with each spring arm including a switch-back along an axial length of the spring arm such that a pair of first and second lengths of the spring arm are immediately adjacent the switch-back and are parallel to each other. A first strain sensing element is located at the first length, and a second strain sensing element is located at the second length.
Claims20
A pivot mount comprising:
- a pivot platform;
- a base;
- a plurality of spring arms, each spring arm fixed to the pivot platform at a corresponding inner root, and fixed to the base at a corresponding outer root;
- wherein each spring arm includes:
- a switch-back along an axial length of the spring arm such that a pair of first and second lengths of the spring arm immediately adjacent the switch-back are parallel to each other;
- a first strain sensing element at the first length;
- and
- a second strain sensing element at the second length.
A pivot mount comprising:
- a pivot platform including a plurality of compliant voltage contacts;
- a base;
- and
- a plurality of spring arms, each spring arm fixed to the pivot platform at a corresponding inner root, and fixed to the base at a corresponding outer root.
A transfer tool comprising:
- an articulating transfer head assembly;
- a pivot mount, mountable onto the articulating transfer head assembly comprising:
- a pivot platform;
- a base;
- a plurality of spring arms, each spring arm fixed to the pivot platform at a corresponding inner root, and fixed to the base at a corresponding outer root;
- wherein each spring arm includes:
- a switch-back along an axial length of the spring arm such that a pair of first and second lengths of the spring arm immediately adjacent the switch-back are parallel to each other;
- a first strain sensing element at the first length;
- a second strain sensing element at the second length;
- and
- a micro pick up array mountable onto the pivot platform of the pivot mount, the micro pick up array including an array of electrostatic transfer heads.
Dependencies are inferred from the claim text.