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US 2015/0351159 A1Published application
Carbon heater, heater unit, firing furnace, and method for manufacturing silicon-containing porous ceramic fired body
AssigneeIbiden Co., Ltd.
InventorsHiromichi KAMIJO, Tadafumi OHASHI, Takamitsu SAIJO
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Abstract
A carbon heater to fire a silicon-containing material in a non-oxidizing atmosphere includes a cross-sectional shape of a substantially n-sided polygon, and n represents any one of 3 to 8.
Claims20
A carbon heater to fire a silicon-containing material in a non-oxidizing atmosphere, comprising:
- a cross-sectional shape of a substantially n-sided polygon, n representing any one of 3 to 8.
A heater unit to fire a silicon-containing material in a non-oxidizing atmosphere, comprising:
- a power source;
- and
- a carbon heater connected to the power source, the carbon heater having a cross-sectional shape of a substantially n-sided polygon, n representing any one of 3 to 8.
A firing furnace to fire a silicon-containing material in a non-oxidizing atmosphere, comprising:
- a power source;
- a housing;
- a firing chamber arranged in the housing;
- and
- a carbon heater arranged in the housing and connected to the power source, the carbon heater having a cross-sectional shape of a substantially n-sided polygon, n representing any one of 3 to 8.
2 more elements
A method for manufacturing a silicon-containing porous ceramic fired body, comprising:
- producing an object to be fired from a composition that contains a silicon-containing ceramic powder;
- and
- firing the object to be fired in a non-oxidizing atmosphere in a firing furnace comprising:
- a power source;
- a housing;
- a firing chamber arranged in the housing;
- and
- a carbon heater arranged in the housing and connected to the power source, the carbon heater having a cross-sectional shape of a substantially n-sided polygon, n representing any one of 3 to 8.
5 more elements
Dependencies are inferred from the claim text.