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US 2015/0346002 A1Published application
Methods for fabricating apparatus having a hermetic seal
AssigneeDunan Sensing, LLC
InventorTOM T. NGUYEN
Life of this patent
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Abstract
Apparatus and Methods for fabricating apparatus having a hermetic seal to seal a portion of an apparatus, for example and without limitation, a portion having a MEMS sensor. One such method uses crimping devices to compress a seal in a cavity formed in a housing that includes a MEMS sensor attached to a stress isolator. Under such compression, the seal deforms to hermetically seal surfaces around the inside, outside and bottom of the stress isolator.
Claims20
A method of sealing a sensor to a housing comprising:
- providing a housing with a top and bottom and a hole that passes through the housing from the top to the bottom wherein the housing further comprises a first cavity and a second cavity wherein both cavities have an inner wall, outer wall and cavity bottom and both cavities extend down into the housing from the top and surround the hole wherein the outer wall of the first cavity is the inner wall of the second cavity.
- providing a seal with a top and bottom and a hole that passes through the seal from the top to the bottom wherein the inner wall surrounds and forms the hole and the outer wall surrounds the inner wall and is coupled to the inner wall by the bottom.
- pressing the seal inside the first cavity such that the bottom of the seal is pressed against the bottom of the first cavity;
- providing an isolation member coupled to the sensor;
- placing the isolation member down into the first cavity such that the isolation member extends down between the inner wall and outer wall of the seal.
- placing a collar down into the second cavity and pressing the collar down such that it deforms the inner wall of the second cavity and seals the housing to the isolation member.
3 more elements
An apparatus comprising:
- a housing with a top and bottom and a hole that passes through the housing from the top to the bottom wherein the housing further comprises a first cavity and a second cavity wherein both cavities have an inner wall, outer wall and cavity bottom and both cavities extend down into the housing from the top and surround the hole wherein the outer wall of the first cavity is the inner wall of the second cavity;
- a seal with a top and bottom and a hole that passes through the seal from the top to the bottom wherein the inner wall surrounds and forms the hole and the outer wall surrounds the inner wall and is coupled to the inner wall by the bottom, wherein the seal is pressed into the bottom the first cavity;
- an isolation member coupled to a sensor and located down into the first cavity such that the isolation member extends down between the inner wall and outer wall of the seal.
- a collar located down into the second cavity such that the inner wall of the second cavity deforms and seals the housing to the isolation member.
1 more element
A method of sealing a sensor to a housing comprising:
- pressing a seal into a housing, the seal comprising a U shaped cross section swept around a circumference, wherein the housing includes a cavity that runs in a circle around a hole through the housing and the seal is pressed into the cavity;
- inserting an isolation member into the cavity such that the isolation member fills the space within the U shaped cross section of the seal;
- pressing a collar around the outside of the cavity such that the outer wall is crimped down on the isolation member and the seal is caused to seal the isolation member to the housing.
Dependencies are inferred from the claim text.