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US 2015/0343575 A1Published application
Methods for fabricating apparatus having a hermetic seal
AssigneeDunan Sensing, LLC
InventorTOM T. NGUYEN
Life of this patent
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Abstract
Apparatus and Methods for fabricating apparatus having a hermetic seal to seal a portion of an apparatus, for example and without limitation, a portion having a MEMS sensor. One such method uses crimping devices to compress a seal in a cavity formed in a housing that includes a MEMS sensor attached to a stress isolator. Under such compression, the seal deforms to hermetically seal surfaces around the inside, outside and bottom of the stress isolator.
Claims21
A method of sealing a sensor to a housing comprising:
- providing a housing with a top and bottom and a hole that passes through the housing from the top to the bottom wherein the housing further comprises a cavity with an inner wall, outer wall and cavity bottom and the cavity extends down into the housing from the top and surrounds the hole;
- pressing a ring shaped seal inside the cavity such that the bottom of the seal is pressed against the bottom of the cavity;
- providing an isolation member coupled to the sensor;
- placing the isolation member down into the cavity such that the isolation member extends down on top of the ring shaped seal;
- and,
- placing a collar down into the housing and pressing the collar down such that it deforms the outer wall of the cavity and seals the housing to the isolation member.
3 more elements
An apparatus comprising:
- a housing with a top and bottom and a hole that passes through the housing from the top to the bottom wherein the housing further comprises a cavity with an inner wall, outer wall and cavity bottom and the cavity extends down into the housing from the top and surrounds the hole;
- a ring shaped seal located in the bottom of the cavity;
- an isolation member coupled to a sensor and located down into the cavity such that the isolation member extends down on top of the seal between the inner wall and outer wall of the cavity.
- a collar pressed down into the housing such that the outer wall of the cavity and seal are deformed and seal the housing to the isolation member.
1 more element
A method of sealing a sensor to a housing comprising:
- pressing a ring shaped seal into a housing, wherein the housing includes a cavity that runs in a circle around a hole through the housing and the seal is pressed into the cavity;
- inserting an isolation member into the cavity such that the isolation member covers the seal;
- pressing a collar around the outside of the cavity such that an outer wall of the cavity is crimped down on the isolation member and the seal is deformed sealing the isolation member to the housing.
Dependencies are inferred from the claim text.