Method and control unit for operating a plasma generation apparatus

A method of initiating plasma in an apparatus comprising an anode and a cathode, the method comprising:

• applying a maintenance voltage (UA) between an anode and a cathode;
• applying an igniting voltage (UZ) between the anode and the cathode in order to cause ignition of plasma;
• increasing the igniting voltage (UZ);
• continuously checking to determine whether the ignition of the plasma has occurred;
• and
• when ignition of the plasma is determined to have occurred, reducing or stopping the igniting voltage (UZ) so that the voltage between the anode and the cathode is reduced to the maintenance voltage (UA).

A plasma initiation control system comprising:

• a maintenance voltage source connected to and supplying to a maintenance voltage (UA) to an anode and a cathode of a plasma generating apparatus;
• an ignition voltage source connected to and supplying an igniting voltage (UZ) to the anode and the cathode;
• a control unit structured and arranged to each of:
• continuously check to determine whether ignition of a plasma has occurred;
• increase the igniting voltage (UZ) starting from an initial ignition voltage (UZA);
• and
• detect the ignition of the plasma and stop or reduce the igniting voltage (UZ).

A plasma initiation control system comprising:

• a voltage source connected to an anode and a cathode of a plasma generating apparatus;
• an ignition voltage source connected to the anode and the cathode;
• a control unit connected to the ignition voltage source and being structured and arranged to each of:
• continuously check to determine whether ignition of a plasma has occurred;
• control the ignition voltage source such that upon detecting the ignition of the plasma, an igniting voltage (UZ) supplied by the ignition voltage source is reduced or stopped.