Frequency modulated microphone system
AssigneeRobert Bosch GmbH
InventorSucheendran Sridharan
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AssigneeRobert Bosch GmbH
InventorSucheendran Sridharan
Estimating the term…
Systems and methods of sensing audio with a MEMS microphone that modulates a frequency of a phase-locked loop. The MEMS microphone includes a movable electrode and a stationary electrode. The movable electrode is configured such that acoustic pressures acting on the movable electrode cause movement of the movable electrode. A voltage-controlled oscillator of the phase-locked loop is coupled to the MEMS microphone and receives a control signal. The voltage-controlled oscillator also generates an oscillating signal based on the control signal and a capacitance between the movable electrode and the stationary electrode. A phase detector of the phase-locked loop receives and determines a phase difference between the oscillating signal and a reference signal. The phase detector further generates the control signal based on the phase difference. A controller is configured to receive the control signal and determine an audio signal based on the control signal.
A microphone system comprising:
A method of sensing audio with a MEMS microphone, the MEMS microphone including a movable electrode having a first side and a second side opposite the first side, the movable electrode configured such that acoustic pressures acting on the first side and the second side of the movable electrode cause movement of the movable electrode and a stationary electrode positioned on the first side of the movable electrode, the method comprising:
Dependencies are inferred from the claim text.