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AssigneeInternational Business Machines Corporation
InventorsJames W. ADKISSON, Panglijen CANDRA, Thomas J. DUNBAR, Jeffrey P. GAMBINO, Mark D. JAFFE, Anthony K. STAMPER, Randy L. WOLF
Estimating the term…
Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed on a piezoelectric substrate. The method further includes forming a fixed electrode with a plurality of fingers on the piezoelectric substrate. The method further includes forming a moveable electrode with a plurality of fingers over the piezoelectric substrate. The method further includes forming actuators aligned with one or more of the plurality of fingers of the moveable electrode.
A filter comprising at least one filter comprising a plurality of electrodes formed on a piezoelectric substrate, wherein the plurality of electrodes include a moveable electrode and a fixed electrode both with a plurality of fingers that are positioned to be interleaved with one another in an on state.
A method in a computer-aided design system for generating a functional design model of a tunable filter structure, the method comprising:
A method comprising:
Dependencies are inferred from the claim text.