Enhanced mems vibrating device
AssigneeRF Micro Devices, Inc.
InventorsKushal Bhattacharjee, Sergei Zhgoon
Life of this patent
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Abstract
A MEMS vibrating device includes a substrate, at least one anchor on a surface of the substrate, and a vibrating body suspended over the substrate by the at least one anchor. The vibrating body includes a first piezoelectric thin-film layer, a second piezoelectric thin-film layer over the first piezoelectric thin-film layer, and an inter-digital transducer embedded between the first piezoelectric thin-film layer and the second piezoelectric thin-film layer. Embedding the inter-digital transducer between the first piezoelectric thin-film layer and the second piezoelectric thin-film layer may result in enhanced vibrational characteristics of the MEMS vibrating device, thereby increasing the performance thereof.
Claims30
A micro-electrical-mechanical system (MEMS) device comprising:
- a substrate;
- at least one anchor on a surface of the substrate;
- and
- a vibrating body suspended over the substrate by the at least one anchor and comprising:
- a first piezoelectric thin-film layer;
- a second piezoelectric thin-film layer over the first piezoelectric thin-film layer;
- and
- an inter-digital transducer embedded between the first piezoelectric thin-film layer and the second piezoelectric thin-film layer and comprising a first electrode and a second electrode each having a number of interlocking conductive sections.
A micro-electrical-mechanical system (MEMS) device comprising:
- a substrate;
- at least one anchor on a surface of the substrate;
- and
- a vibrating body suspended over the substrate by the at least one anchor and comprising:
- a first piezoelectric thin-film layer;
- a second piezoelectric thin-film layer over the first piezoelectric thin-film layer;
- an interposer layer between the first piezoelectric thin-film layer and the second piezoelectric thin-film layer;
- and
- an inter-digital transducer embedded in the interposer layer and comprising a first electrode and a second electrode each having a number of interlocking conductive sections.
Dependencies are inferred from the claim text.