Piezoelectric actuator and robot
AssigneeSeiko Epson Corporation
InventorsKoichi KAMIJO, Osamu MIYAZAWA
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Abstract
A piezoelectric actuator includes a piezoelectric element, a vibrating plate configured to vibrate according to application of a signal to the piezoelectric element, and a driven body driven by the vibration of the vibrating plate. The vibrating plate vibrates in a first mode according to a signal having a first frequency, vibrates in a second mode according to a signal having a second frequency, and vibrates in a third mode according to a signal having a third frequency. The first frequency and the second frequency are different. The first frequency and the third frequency are different.
Claims16
A piezoelectric actuator comprising:
- a piezoelectric element;
- a vibrating plate configured to vibrate according to application of a signal to the piezoelectric element;
- and
- a driven body driven by the vibration of the vibrating plate, wherein
- the vibrating plate vibrates in a first mode according to a signal having a first frequency, vibrates in a second mode according to a signal having a second frequency, and vibrates in a third mode according to a signal having a third frequency, and
- the first frequency and the second frequency are different and the first frequency and the second frequency are different.
Dependencies are inferred from the claim text.