Actuator apparatus, electronic device, and control method
AssigneeSeiko Epson Corporation
InventorNozomu HIROKUBO
Life of this patent
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Abstract
An actuator apparatus includes a pair of substrates facing each other; a plurality of bias actuators that each vary a gap dimension of a gap between the pair of substrates; a gap detection portion that detects the gap dimension; and a voltage control unit that controls driving of each of the bias actuators on the basis of the detected gap dimension. The bias actuators are located asymmetric relative to a driving central axis and are mutually independently driven; and the voltage control unit derives driving parameters for use in driving the bias actuators, on the basis of voltages and gap dimensions obtained by sequentially switching and driving the bias actuators on by one.
Claims9
An actuator apparatus comprising:
- a pair of substrates facing each other;
- a plurality of electrostatic actuators that each vary a gap dimension of a gap between the pair of substrates;
- a gap detection portion that detects the gap dimension;
- and
- driving controller that controls driving of each of the plurality of electrostatic actuators,
- wherein the plurality of electrostatic actuators are mutually independently driven, and the driving controller derives at least one driving parameter for use in driving each the plurality of electrostatic actuators on the basis of a voltage supplied to each of the plurality of electrostatic actuators and a gap dimension detected by the gap detection portion at a time of the supply of the voltage thereto.
A control method for an actuator apparatus, comprising:
- supplying each of a plurality of electrostatic actuators with a voltage;
- detecting, by a gap detection portion, a gap dimension of a gap between a pair of substrates every time each of the plurality of electrostatic actuators is supplied with the voltage;
- and
- deriving a driving parameter for driving each of the plurality of electrostatic actuators on the basis of the voltage supplied to each of the plurality of electrostatic actuators and the gap dimension at a time of the supply of the voltage thereto.
Dependencies are inferred from the claim text.