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US 2015/0318475 A1Published application
Imprinted Memory
OwnerGuobiao ZHANGinventor
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Abstract
The present invention discloses an imprinted memory, more particularly a three-dimensional imprinted memory (3D-iP). Instead of photo-lithography, it uses imprint-lithography (also referred to as nano-imprint lithography, or NIL) to record data. For the sub-100 nm nodes, the data-template used by imprint-lithography is much less expensive than the data-mask used by photo-lithography.
Claims20
A method of manufacturing an imprinted memory, comprising the steps of:
- 1) forming a data-coding layer;
- 2) transferring a data-pattern from a data-template to said data-coding layer using imprint-lithography;
- 3) forming a plurality of address lines coupled to said data-pattern;
- wherein said data-pattern represents data stored in said imprinted memory;
- the dimensional of said data-pattern is less than 100 nm;
- and, said data-template comprises nanometer-scale non-periodic pattern.
3 more elements
Dependencies are inferred from the claim text.