Optoelectronic device and method for manufacturing the same
AssigneeEpistar Corporation
InventorsWei Chih PENG, Shih Te PAI
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Abstract
An optoelectronic device includes a substrate; a first semiconductor layer having a first conductivity-type impurity formed on the substrate, an active layer formed on the first semiconductor layer, and a second semiconductor layer having a second conductivity-type impurity formed on the active layer; and a hollow component formed inside the active layer or the second semiconductor layer, wherein a material of the active layer or a material of the second semiconductor layer comprises group IIIA nitride semiconductor.
Claims20
An optoelectronic device comprising:
- a substrate;
- a first semiconductor layer having a first conductivity-type impurity formed on the substrate,
- an active layer formed on the first semiconductor layer;
- a second semiconductor layer having a second conductivity-type impurity formed on the active layer;
- and
- a hollow component formed inside the active layer or the second semiconductor layer;
- wherein a material of the active layer or a material of the second semiconductor layer comprises group IIIA nitride semiconductor.
A method of fabricating an optoelectronic device, comprising:
- providing a substrate;
- forming a first semiconductor layer having a first conductivity-type impurity on the substrate;
- forming an active layer on the first semiconductor layer;
- forming a second semiconductor layer having a second conductivity-type impurity;
- and
- forming a hollow component inside the second semiconductor layer and/or the active layer;
- wherein a material of the active layer or a material of the second semiconductor layer comprises group IIIA nitride semiconductor.
Dependencies are inferred from the claim text.