Amorphous oxide thin film transistor, method for manufacturing the same, and display panel
AssigneeBoe Technology Group Co., Ltd.
InventorsXiaodi LIU, Li SUN, Haijing CHEN
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AssigneeBoe Technology Group Co., Ltd.
InventorsXiaodi LIU, Li SUN, Haijing CHEN
Estimating the term…
Embodiments of the disclosed technology provide an amorphous oxide thin film transistor (TFT), a method for preparing an amorphous oxide TFT, and a display panel. The amorphous oxide thin film transistor includes: a gate electrode, a gate insulating layer, a semiconductor active layer, a source electrode and a drain electrode. The semiconductor active layer comprises a channel layer and an ohmic contact layer, and the channel layer has a greater content of oxygen than the ohmic contact layer; the channel layer contacts the gate insulating layer, and the ohmic contact layer comprises two separated ohmic contact regions, one of which contacts the source electrode and the other of which contacts the drain electrode.
A method for manufacturing an amorphous oxide thin film transistor (TFT) comprising a gate electrode, a gate insulating layer, a semiconductor active layer, a source electrode and a drain electrode, the method comprising:
Dependencies are inferred from the claim text.