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US 2015/0318306 A1Published application
Method of transferring thin film, method of manufacturing thin film transistor, method of forming pixel electrode of liquid crystal display device
AssigneeNikon Corporation
InventorsMakoto NAKAZUMI, Yasutaka NISHI
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Abstract
A method of transferring a thin film is a method of transferring a thin film formed on a first substrate to a second substrate, the method including: allowing the first substrate to come into contact with a liquid to swell the first substrate; allowing the second substrate and the thin film to come into contact with each other via the liquid; and drying the liquid to allow the thin film to adhere to the second substrate.
Claims11
A method of transferring a thin film, in which a thin film formed on a first substrate is transferred to a second substrate, the method comprising:
- allowing the first substrate to come into contact with a liquid to swell the first substrate;
- allowing the second substrate and the thin film to come into contact with each other via the liquid;
- and
- drying the liquid to allow the thin film to adhere to the second substrate.
1 more element
Dependencies are inferred from the claim text.