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US 2015/0318290 A1Published application
Memory device and manufacturing method thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorJhon-Jhy LIAW
Life of this patent
Estimating the term…
Abstract
A memory device includes an array of memory cells. At least one of the memory cells includes a plurality of transistors with vertical-gate-all-around configurations and a plurality of active blocks. A portion of one of the active blocks serves as a source or a drain of one of the transistors. The active blocks in any adjacent two of the memory cells are isolated from each other.
Claims20
A memory device comprising:
- an array of memory cells, at least one of the memory cells comprising:
- a plurality of transistors with vertical-gate-all-around configurations;
- and
- a plurality of active blocks, a portion of one of the active blocks serving as a source or a drain of one of the transistors,
- wherein the active blocks in any adjacent two of the memory cells are isolated from each other.
2 more elements
A memory device comprising:
- an array of memory cells, at least one of the memory cells comprising:
- a plurality of transistors with vertical-gate-all-around configurations;
- and
- a plurality of active blocks, a portion of one of the active blocks serving as a source or a drain of one of the transistors,
- wherein the active blocks in one of the memory cells are distant from boundaries of said memory cell.
2 more elements
A method for manufacturing a memory device, comprising:
- forming an array of memory cells on or above a substrate, wherein forming at least one of the memory cells comprises:
- forming a plurality of active blocks on or above the substrate, and the active blocks in any adjacent two of the memory cells are isolated from each other;
- and
- forming a plurality of transistors with vertical-gate-all-around configurations on or above the substrate, wherein a portion of at least one of the active blocks serves as a source or a drain of one of the transistors.
1 more element
Dependencies are inferred from the claim text.