Wide-bottom contact for non-planar semiconductor structure and method of making same

Abstract

A wide-bottom contact to epitaxial structures in a non-planar semiconductor structure is provided. A starting structure includes a non-planar semiconductor structure, the structure including a semiconductor substrate, fins coupled to the substrate, and epitaxial structures (e.g., diamond-shaped silicon epitaxy) on the fins. Trenches to the epitaxial structures with roughly vertical sidewalls are created from a field oxide and photoresist. Silicide is formed on the epitaxial structures, and bottom contact portions (of metal, e.g., tungsten) are conformally created on the silicide. The vertical sidewalls allow for a wider bottom. Contact bodies are then formed on the bottom contact portions.

Dependencies are inferred from the claim text.