Substrate processing apparatus and substrate processing method
AssigneeSCREEN Holdings Co., Ltd.
InventorJoji KUWAHARA
Life of this patent
Estimating the term…
Abstract
One or plurality of correction information corresponding to one or plurality of spin chucks are acquired in advance for adjustment of a position of a substrate by an aligner and are stored in a memory. Each correction information indicates a position to be adjusted by the aligner when the substrate is transported from the aligner to each spin chuck by a transport mechanism in order for a center of the transported substrate to coincide with a rotational center of the spin chuck. The position of the substrate is adjusted by the aligner based on the correction information, corresponding to the spin chuck, stored in the memory before the substrate is transported to any one of the spin chucks from the aligner during processing for the substrate.
Claims12
A substrate processing apparatus that performs processing on a substrate, comprising:
- one or plurality of substrate supporters that have preset reference positions and support the substrate;
- a position adjustor that is configured to be capable of adjusting a position of the substrate that is carried in;
- a transport device that is configured to be capable of transporting the substrate between the position adjuster and the one or plurality of substrate supporters;
- a storage that stores one or plurality of correction information, corresponding to the one or plurality of substrate supporters, acquired in advance for the adjustment of the position of the substrate by the position adjustor;
- and
- a controller that controls the position adjustor to adjust the position of the substrate before the substrate is transported from the position adjuster to one substrate supporter of the one or plurality of substrate supporters during the processing for the substrate based on correction information, corresponding to the one substrate supporter, of the one or plurality of correction information stored in the storage, wherein
- each of the one or plurality of correction information indicates the position to be adjusted by the position adjustor when the substrate is transported from the position adjustor to each of the one or plurality of substrate supporters by the transport device in order for a center of the transported substrate to coincide with the reference position in the substrate supporter.
A substrate processing method for performing processing on a substrate, including the steps of:
- storing one or plurality of correction information, corresponding to one or plurality of substrate supporters, acquired in advance for adjustment of a position of the substrate by a position adjustor;
- adjusting the position of the substrate by the position adjustor based on the correction information, corresponding to one substrate supporter, of the one or plurality of correction information stored in the storage before the substrate is transported from the position adjustor to one substrate supporter of the one or plurality of substrate supporters during the processing for the substrate;
- and
- transporting the substrate of which the position is adjusted by the position adjustor to the one substrate supporter by a transport device, wherein
- each of the one or plurality of correction information indicates the position to be adjusted by the position adjustor when the substrate is transported to each of the one or plurality of substrate supporters from the position adjustor by the transport device in order for a center of the transported substrate to coincide with a reference position in the substrate supporter.
Dependencies are inferred from the claim text.