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US 2015/0318190 A1Published application
BAW Gyroscope with Bottom Electrode
AssigneeAnalog Devices, Inc.
InventorsFiras N. Sammoura, Kuang L. Yang
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Abstract
A bulk acoustic wave gyroscope has a primary member in a member plane, and an electrode layer in an electrode plane spaced from the member plane. The electrode layer has a first portion that is electrically isolated from a second portion. The first portion, however, is mechanically coupled with the second portion and faces the primary member (e.g., to actuate or sense movement of the primary member). For support, the second portion of the electrode is directly coupled with structure in the member plane.
Claims18
A method of forming a bulk acoustic wave gyroscope, the method comprising:
- forming a primary member in a member plane;
- forming an electrode layer in an electrode plane that is spaced from the member plane;
- removing a portion of the electrode layer to form a trench;
- and
- filling the trench with a non-conductive material to produce a first portion of the electrode layer and a second portion of the electrode layer, the non-conductive material mechanically connecting the first portion of the electrode layer and the second portion of the electrode layer, the nonconductive material electrically isolating the first portion of the electrode layer from the second portion of the electrode layer, the second portion being separate from the primary member and stabilizing the electrode layer.
2 more elements
Dependencies are inferred from the claim text.