Sample Base, Charged Particle Beam Device and Sample Observation Method
AssigneeHitachi High-Technologies Corporation
InventorsYusuke OMINAMI, Takashi OHSHIMA, Sukehiro ITO
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Abstract
This charged particle beam device irradiates a primary charged particle beam generated from a charged particle microscope onto a sample arranged on a light-emitting member that makes up at least a part of a sample base, and, in addition to obtaining charged particle microscope images by the light-emitting member detecting charged particles transmitted through or scattered inside the sample, obtains optical microscope images by means of an optical microscope while the sample is still arranged on the sample platform.
Claims16
A sample base, which is mounted with a sample to be observed by irradiating a charged particle beam, comprising
- a light-emitting member which forms at least a portion of the sample base, and emits light by charged particles transmitted through or scattered inside the sample,
- wherein the sample is placed directly or via a predetermined member on the light-emitting member, and
- wherein infrared light, ultraviolet light, or visible light of a specific or all wavelength ranges can pass through at least between a portion on which the sample is placed and a surface opposite to the portion on which the sample is placed in the sample base.
A charged particle beam device comprising:
- a charged particle optical column for irradiating a sample with a primary charged particle beam;
- a vacuum pump for vacuum-evacuating an inside of the charged particle optical column;
- a sample stage on which a light-emitting member for emitting light by charged particles transmitted through or scattered inside the sample, or a sample base including the light-emitting member is detachably arranged;
- and
- a light conversion detector for convening emitted light, which passes through at least between a portion on which the sample is placed and a surface opposite to the portion on which the sample is placed in the sample base, from the light-emitting member to an electrical signal.
A sample observation method for observing a sample by irradiating a charged particle beam in a charged particle microscope, comprising following steps:
- a step of irradiating the charged particle beam to the sample placed directly or via a predetermined member on a light-emitting member which forms at least a part of a sample base and emits light by charged particles passed through or scattered inside the sample;
- a step of obtaining a charged particle microscope image by detecting emitted light of the light-emitting member;
- and
- a step of obtaining an optical microscope image by an optical microscope while the sample is placed on the sample base.
Dependencies are inferred from the claim text.