US 2015/0318017 A1 · METHOD FOR CLEANING GLASS SUBSTRATE

Abstract

To provide a method for cleaning a glass substrate in which aggravation of surface roughness of the glass substrate in alkali cleaning is suppressed and cleaning performance is improved. In one or a plurality of embodiments, this invention relates to a method for cleaning a glass substrate, including bringing a detergent composition into contact with a glass substrate to be cleaned. The detergent composition containing an amine including 1 to 10 nitrogen atoms and an inorganic alkali, the amine content is in a range of 5.00 mass % to 70.00 mass % relative to the total mass of components of the detergent composition other than water, the glass substrate to be cleaned is a crystallized glass substrate, and a pH of the detergent composition during cleaning is in a range of 9.00 to 11.50.

Claims20

Dependent claims

A method for producing a glass hard disk substrate, comprising steps (1) and (2) below:

step (1) of polishing a glass substrate to be polished by use of a polishing liquid composition;
and
step (2) of cleaning the substrate obtained in step (1) by use of a detergent composition,
wherein the detergent composition contains an amine including 1 to 10 nitrogen atoms and an inorganic alkali,
a content of the amine is in a range of 5.00 mass % to 70.00 mass % relative to the total mass of components of the detergent composition other than water,
a mass ratio of the amine to an alkali metal ion derived from the inorganic alkali [(content of amine)/(content of alkali metal ion)] is in a range of 0.50 to 12.00,
the glass substrate to be cleaned is a crystallized glass substrate, and
a pH of the detergent during cleaning is in a range of 9.00 to 11.50.

5 more elements

Dependencies are inferred from the claim text.

Method for cleaning glass substrate

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Method for cleaning glass substrate

Life of this patent

Abstract

Claims20