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US 2015/0318004 A1Published application
Bottom shield stabilized magnetic seed layer
AssigneeSeagate Technology LLC
InventorsEric Walter Singleton, Liwen Tan, Jae-Young Yi
Life of this patent
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Abstract
A data reader generally capable of sensing data bits may be configured at least with a magnetic stack that has free and fixed magnetization structures atop a magnetic seed layer. A bottom shield may be positioned contactingly adjacent the magnetic stack opposite a top shield with the bottom shield having a fixed pinning magnetization set to a predetermined magnetic orientation.
Claims20
A method comprising:
- depositing a shield layer;
- forming a shield fixed magnetization structure atop the shield layer;
- depositing a pattern on the shield fixed magnetization structure, the pattern shaped with a first width contacting the bottom shield and a greater second width distal the bottom shield, the first and second widths defining at least one notch;
- backfilling an insulating material into the at least one notch;
- lifting off the pattern and insulating material;
- forming a magnetic seed layer on the shield;
- and
- depositing a magnetic stack atop the magnetic seed layer, magnetic stack comprising free and stack fixed magnetization structures.
5 more elements
A method comprising:
- depositing a shield layer;
- forming a shield fixed magnetization structure atop the shield layer;
- depositing a first stop layer on the shield fixed magnetization structure;
- depositing a pattern on the shield fixed magnetization structure, the pattern shaped with a first width contacting the bottom shield and a greater second width distal the bottom shield, the first and second widths defining first and second notches;
- backfilling an insulating material to partially fill each notch;
- depositing a second stop layer on the insulating material and pattern;
- lifting off the pattern, insulating material, first stop layer, and second stop layer;
- forming a magnetic seed layer on the shield;
- and
- depositing a magnetic stack atop the magnetic seed layer, magnetic stack comprising free and stack fixed magnetization structures.
7 more elements
A method comprising:
- depositing a shield layer;
- forming a shield fixed magnetization structure atop the shield layer;
- depositing a pattern on the shield fixed magnetization structure, the pattern shaped with a first width contacting the bottom shield and a greater second width distal the bottom shield, the first and second widths defining at least one notch;
- backfilling an insulating material into the at least one notch;
- lifting off the pattern and insulating material;
- polishing the shield fixed magnetization structure with a chemical mechanical polish;
- forming a magnetic seed layer on the shield;
- and
- depositing a magnetic stack atop the magnetic seed layer, magnetic stack comprising free and stack fixed magnetization structures.
6 more elements
Dependencies are inferred from the claim text.